Paper Status Tracking

Journals by Title

Journals by Subject

Contact us

	[email protected]
	3275638434

	Paper Publishing WeChat

Useful Links

Creative Commons Attribution-NonCommercial 4.0 International License

Article

Open Access

Modeling and Analysis of Electrostatically Actuated MEMS under Combined Nonlinearities, Lorentz Force, and Mechanical Shock

Author(s)

Emran Khoshrouye Ghiasi

Full-Text PDF Download XML 5779 Views

DOI:10.17265/2328-2231/2016.02.004

Affiliation(s)

Department of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad 96911, Iran

ABSTRACT

This paper shows an analysis of MEMS (micro electro mechanical systems) due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Kármán geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.

KEYWORDS

MEMS, mechanical shock, nonlinearity, pull-in, Galerkin weighted method, dimensionless parameters.

Cite this paper

References