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Practical Approach Design Piezoresistive Pressure Sensor in Circular Diaphragm



Author(s)

Renan Gabbi^1,2, Luiz Antônio Rasia², Daniel Curvello de Mendonça Müller³, Jorge Ramírez Beltrán⁴, José Antonio Gonzalez da Silva² and Manuel Martin Perez Reimbold²

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DOI:10.17265/2161-6221/2019.5-6.001

1. Federal Institute of Education, Science and Technology Farroupilha, Campus Panambi, Panambi 98280-000, Brazil
2. Department of Exact Sciences and Engineering, Regional University of the Northwest of the State of Rio Grande do Sul, Panambi 98280-000, Brazil
3. University Veterinary Hospital, Federal University of Santa Maria, Santa Maria 97105-900, Brazil
4. Technological University of Habana José Antonio Echeverría, Havana 62644, Cuba

This paper presents a methodology for analytical calculation and computational simulation using the finite element method for piezoresistive graphite sensor element on flexible polymer substrate, A4 paper. The computer simulation aims to find the region of greatest mechanical tension and deflection of the circular diaphragm set in the circumference edges. The steps for simulation are geometry definition, mesh generation, inclusion of material physical properties and simulation execution. The mathematical modeling of maximum mechanical stress and deflection is described analytically and computationally. The analytical calculations were compared with the computer simulation and presented a relative percentage error of 3.38% for the maximum deflection. The results show that the piezoresistor should be positioned at the edges of the circular diaphragm to take advantage of maximum mechanical stress by defining the best location for graphite film deposition for sensor device designs and fabrications.

Piezoresistivity, sensor element, finite elements and mathematical modeling.