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Article

Open Access

Modeling and Analysis of Electrostatically Actuated MEMS under Combined Nonlinearities, Lorentz Force, and Mechanical Shock

Author(s)

Emran Khoshrouye Ghiasi

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DOI:10.17265/2328-2231/2016.02.004

Affiliation(s)

Department of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad 96911, Iran

ABSTRACT

This paper shows an analysis of MEMS (micro electro mechanical systems) due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Kármán geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.

KEYWORDS

MEMS, mechanical shock, nonlinearity, pull-in, Galerkin weighted method, dimensionless parameters.

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